Yokogawa EJX438A Bedienungsanleitung PDF herunterladen (Seite 10)

8.2 Model and Sufx Codes (for EJA118E, EJX118A, EJA438E, and EJX438A)

Fill uid

-1……

-2……

-4……

[Process temperature] [Ambient temperature]

High temp. and high vacuum use (Silicone oil)

–10 to 250°C –10 to 60°C

High temp. and high vacuum use (Silicone oil)

10 to 310°C 10 to 60°C

High vacuum use (Silicone oil) –10 to 100°C –10 to 60°C

*1: In case of wetted parts material code TW (Tantalum), process temperature limit is up to 200°C (392°F)

*2: Not applicable for wetted parts material code TW (Tantalum).

*3: Not applicable for process connection size code 8 (1 1/2-inch).

*4: Not applicable for ashing connection ring code 1, 2, A, and B.

*5: Not applicable for wetted parts material code UW (Titanium).

*6: The upper ambient temperature limit is 50°C (122°F) in the following combinations.

Process connection style code Process connection size code

W (Flush type) 2 (2-inch) or 8 (1 1/2-inch)

E (Extension type) 3 (3-inch)

8.3 Optional Specications (for EJA118E, EJX118A, EJA438E, and EJX438A)

Teon lm* Diaphragm protection from sticky process uid by FEP Teon lm attached with

uorinated oil.

Operation range: 20 to 150°C, 0 to 2 MPa (Not applicable for vacuum service).

TF1

*: Applicable for the combination of ush type (process connection style code W) and ushing connection ring code 0.

Not applicable for Fill uid code 1, 2, or 4.

(IV) Dimensions for Process connection code 8 and 9 (for EJA510E, EJX510A, EJX610A, EJA530E, EJX530A, and

EJX630A)

9.4 Dimensions

 With Process connections code 8 and 9

Regarding process connection code 8 and 9, the appearance of process connection part has been changed in

January, 2013.

The difference can be distinguished by the 3-digit marking engraved on the side of hexagonal nut part.

5(0.20) 20(0.78)

ø6

(0.24)

172

(6.77)

5(0.20)

24(0.94)

ø6

(0.24)

172

(6.77)

Marking (3 digits):

=Numerical character such as `3´: See figure (a).

=Alphabet such as `N´: See figure (b).

(a) (b)

1 2 3 4 5 6 7 8 9 10

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